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Introduction

MEMS Sensor Interface Circuitry, This part of the circuit provides actuation voltages for sense and drive electrodes of the MEMS sensor, MEMS Sensor Drive (DRV) Loop, the drive loop 110 incorporates a phase shift 115A (DRV Phase) required to achieve an oscillation condition of a drive resonator 119 (including a mechanical element, e.g., a suspended mass) of the MEMS sensor, as well as automatic gain control 115B (AGC) to control the amplitude of oscillation of the mechanical element, MEMS Sensor Sense (SNS) Loop, the MEMS sensor includes a sense resonator 129 (including a mechanical element, e.g., a suspended mass), The Digital Processing Core: decimates and filters the output of the sigma delta modulators of both the drive and sense loops, and performs a final sense signal demodulation operation, Power Management: This block provides all required biasing currents and supply voltages to different circuit blocks. The Temperature Sensing System: This block senses the die temperature and converts it into a digital reading. Clocking PLL The PLL generates the master clock of the system

Main Concepts

MEMS Sensor Interface Circuitry, This part of the circuit provides actuation voltages for sense and drive electrodes of the MEMS sensor, MEMS Sensor Drive (DRV) Loop, the drive loop 110 incorporates a phase shift 115A (DRV Phase) required to achieve an oscillation condition of a drive resonator 119 (including a mechanical element, e.g., a suspended mass) of the MEMS sensor, as well as automatic gain control 115B (AGC) to control the amplitude of oscillation of the mechanical element, MEMS Sensor Sense (SNS) Loop, the MEMS sensor includes a sense resonator 129 (including a mechanical element, e.g., a suspended mass), The Digital Processing Core: decimates and filters the output of the sigma delta modulators of both the drive and sense loops, and performs a final sense signal demodulation operation, Power Management: This block provides all required biasing currents and supply voltages to different circuit blocks. The Temperature Sensing System: This block senses the die temperature and converts it into a digital reading. Clocking PLL The PLL generates the master clock of the system